Nicolet iG50


Nicolet iG50自动化晶圆分析系统集Nicolet FTIR核心光谱技术优势，专为半导体晶圆片的自动化分析而设计。产品基于功能强大的Nicolet iG50工业化光谱分析平台，能完美的满足Wafer生产过程质量控制、产品研发的测试应用需求。

iG50-Tabletop System


尺寸mm1000w x 1165d x 1590h

iG50-200 6/8-inch Wafer Measurement System 6/8寸晶圆量测

尺寸mm 1400w x 1150d x 1710h

尺寸mm 1470w x 1530d x 1830h

尺寸mm 1985w x 1500d x 1830h

iG50-300 12-inch Wafer Measurement System 12寸晶圆量测

尺寸mm 1470w x 1486d x 1830h

尺寸mm 1470w x 1530d x 1830h

尺寸mm 1985w x 1500d x 1830h

iG50-Oi Ingot Measurement System 硅Oi量测

尺寸mm 4800w x 1515d x 1822h

PC机架尺寸mm 660w x 600d x 480h

应用领域

  • Epitaxial Thickness

  • Carbon & Oxygen in Silicon

  • Boron & Phosphorus in BPSG or PSG Films

  • Hydrogen in Silicon Nitride

  • Fluorine in Silicon Oxside Films

  • Multi Background Option

  • GEM/SECS Host Communication

  • Share File Host Communication

  • Double Station Sorting Support

  • Four Station Sorting Support

  • Six Station Sorting Support

  • Hydrogen in Silicon Software

  • SiC Epitaxial Thickness Support

可定制方案

  • 200mm wafer adapter for FOUP system

  • Tag Reader for FOUP & SMIF system

    • Keyence: BL600

    • Omron: V640E84


  • E84 OHT Support for OHT COM module

  • Safety Light Curtain for OHT

  • Sensing lonizer System

  • Water ID Reader Module

  • Optical FFU (Fan Filter Unit)

  • Share File Host Communication